JPH0747750Y2 - 電子ビームテストシステム - Google Patents

電子ビームテストシステム

Info

Publication number
JPH0747750Y2
JPH0747750Y2 JP1988076467U JP7646788U JPH0747750Y2 JP H0747750 Y2 JPH0747750 Y2 JP H0747750Y2 JP 1988076467 U JP1988076467 U JP 1988076467U JP 7646788 U JP7646788 U JP 7646788U JP H0747750 Y2 JPH0747750 Y2 JP H0747750Y2
Authority
JP
Japan
Prior art keywords
electron beam
tester
trigger signal
supplied
under test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988076467U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01179290U (en]
Inventor
康之 平井
芳雄 甲元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP1988076467U priority Critical patent/JPH0747750Y2/ja
Publication of JPH01179290U publication Critical patent/JPH01179290U/ja
Application granted granted Critical
Publication of JPH0747750Y2 publication Critical patent/JPH0747750Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1988076467U 1988-06-08 1988-06-08 電子ビームテストシステム Expired - Lifetime JPH0747750Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988076467U JPH0747750Y2 (ja) 1988-06-08 1988-06-08 電子ビームテストシステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988076467U JPH0747750Y2 (ja) 1988-06-08 1988-06-08 電子ビームテストシステム

Publications (2)

Publication Number Publication Date
JPH01179290U JPH01179290U (en]) 1989-12-22
JPH0747750Y2 true JPH0747750Y2 (ja) 1995-11-01

Family

ID=31301492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988076467U Expired - Lifetime JPH0747750Y2 (ja) 1988-06-08 1988-06-08 電子ビームテストシステム

Country Status (1)

Country Link
JP (1) JPH0747750Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2552185Y2 (ja) * 1990-05-30 1997-10-27 株式会社アドバンテスト Ic試験装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH073775B2 (ja) * 1986-03-20 1995-01-18 富士通株式会社 ストロボ電子ビ−ム装置

Also Published As

Publication number Publication date
JPH01179290U (en]) 1989-12-22

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